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Quantitative X-Ray Microanalysis: Instrumental Considerations and Applications to Materials Science

  • Nestor J. Zaluzec

Abstract

X-ray microanalysis using a modern transmission or scanning transmission electron microscope (TEM/STEM) is an extremely powerful analytical tool. The ability to observe and characterize the morphology, crystallography, and elemental composition of regions of a specimen as small as 20 nm in diameter is a major breakthrough for materials science. In this chapter the practical aspects of the application of x-ray microanalysis to nonbiological systems will be considered (the use of this technique in biological research is the topic of Chapter 5). This chapter will first deal with optimizing the instrumental factors which influence microanalysis, namely: the specimen/detector geometry; the choice of accelerating voltage, electron gun, imaging mode, and most importantly the elimination of instrumental artifacts. The application of the principles of thin film analysis to simple single phase samples will then be considered, followed by a discussion of multiphase systems where analysis and interpretation becomes more complex. These examples will be drawn primarily from the author’s own experience, because of the difficulties inherent to reconstructing complete experimental details from the literature. The published applications of several other authors are cited in the bibliography.

Keywords

Incident Electron Energy Mass Absorption Coefficient Incident Beam Energy Standardless Analysis Collection Solid Angle 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1979

Authors and Affiliations

  • Nestor J. Zaluzec
    • 1
  1. 1.Metals and Ceramics Division, Oak Ridge National LaboratoryRadiation Effects and Microstructural Analysis GroupOak RidgeUSA

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