Instrumentation for Energy-Loss Spectroscopy
Complete characterization of a specimen in terms of its inelastic scattering would involve recording the scattered intensity J (x, y, z, θ x , θ y , E) as a function of position (coordinates x, y, z) within the specimen and as a function of scattering angle (components θ x and θ y ) and energy loss E. Even if technically feasible, such a procedure would involve storing a vast amount of information, so in practice the acquisition of energy-loss data is restricted to the following categories (see Fig. 2.1).
KeywordsYttrium Aluminum Garnet Wien Filter Chromatic Aberration Fringe Field Detective Quantum Efficiency
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