CVD of Dielectrics

  • Srinivasan Sivaram


Even though electrical conductivity is the main feature that separates conductors from dielectrics, the roles played by dielectrics in microelectronics are more varied when compared to the applications of conductors. Silicon-based integrated circuit technology owes its popularity in no small measure to the existence of a stable native dielectric, SiO2. SiO2 is used as the gate oxide in MOS devices, where it dictates their performance. Dielectrics are used to isolate electrically active components, either semiconductors or conductors. And they are used as capacitors; they provide protection for the device from ambient impurities and moisture.


Silicon Nitride Passivation Film Nitride Film Film Stress Silicon Oxynitrides 
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© Springer Science+Business Media New York 1995

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  • Srinivasan Sivaram

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