Determination of Layer Thicknesses of Single Layers and Multilayers
The measurement of layer thickness is a basic problem, and can be solved both by x-ray reflection and x-ray diffraction (see  for a review). In both methods, the thickness of a thin layer can be determined from the angular positions of the subsidiary maxima on the reflection (or diffraction) curves.
KeywordsCritical Angle Bragg Peak Reflectivity Curve Diffraction Curve Total External Reflection
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