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Strain Analysis in Periodic Nanostructures

  • Ullrich Pietsch
  • Václav Holý
  • Tilo Baumbach
Part of the Advanced Texts in Physics book series (ADTP)

Abstract

The advantage of x-ray diffraction lies in its unique capability to detect the lattice deformation. This is the reason that nowadays strain analysis is one of the main applications of x-ray diffraction to epitaxial structures.

Keywords

Strain Analysis Strain Relaxation Strain Evolution Gallium Content Surface Grating 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • Ullrich Pietsch
    • 1
  • Václav Holý
    • 2
  • Tilo Baumbach
    • 3
  1. 1.Institute of PhysicsUniversity of PotsdamPotsdamGermany
  2. 2.Department of Solid State PhysicsMasaryk UniversityBrnoCzech Republic
  3. 3.Institut fuer SynchrotronstrahlungForschungszentrum Karlsruhe in der Helmholtz-GemeinschaftKarlsruheGermany

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