X-Ray Scattering by Rough Multilayers
This chapter deals with theoretical and experimental aspects of x-ray reflection and diffraction by thin layers and multilayers with rough interfaces illustrated by various examples. We describe the scattering potential of rough multilayers for x-ray reflection and later for x-ray diffraction; the multilayers are characterized by point properties and the correlation properties of their interfaces. General formulae are derived for the coherent part of the specularly scattered intensity by means of the coherent approach. The incoherent approach introduced in Chapter 5 is used for the calculation of the non-specularly scattered intensity. The end of the chapter discusses briefly the extension of the formalism to surface-sensitive diffraction methods.
KeywordsScattered Wave Diffuse Scattering Interface Roughness Roughness Profile Rough Interface
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