Film Properties

  • Jeffrey B. Fortin
  • Toh-Ming Lu


In this chapter we will present some details on the properties of parylene family polymers. We will also present data from parylene-N films deposited in the example deposition system as well as the method and equipment used to perform the measurements. This should provide enough information to understand the application space for parylene films.

Table 6.1 gives a list of the typical properties for the most common types of the parylene family polymers. Data exists but is limited for types the two types of fluorinated parylenes (ring fluorination and aliphatic fluorination). The reader should research the literature for more data those polymers not presented here.


Leakage Current Density Dissipation Factor Volatile Material Thermal Desorption Spectrometer Interface Width 


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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • Jeffrey B. Fortin
    • 1
    • 2
  • Toh-Ming Lu
    • 3
  1. 1.Department of Engineering ScienceRensselaer Polytechnic InstituteTroyUSA
  2. 2.GE Global Research CenterNiskayunaUSA
  3. 3.Department of PhysicsRensselaer Polytechnic InstituteTroyUSA

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