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Parylene-N Precursor Chemistry

  • Jeffrey B. Fortin
  • Toh-Ming Lu
Chapter

Abstract

The starting material for the deposition of parylene film is a dimer in the form of a white powder. This dimer can be purchased through a number of companies in the US and abroad, including Para Tech Coating, Inc. (visit http://www.parylene.com) and Speedline Technologies (visit http://www.scscookson.com). The dimer for parylene-N, which is also called di-para-xylylene and [2,2]paracyclophane was first reported by Brown as a product of xylene pyrolysis and later was synthesized with high yield by Cram [77]. According to Beach et al., there are two common routes to the synthesis of the dimer, di-para-xylyene; the direct pyrolysis of p-xylene and the 1,6 Hoffman elimination of amine from a quaternary ammonium hydroxide [1]. Beach et al. also state that purification of the dimer is often accomplished by recrystallization from the solvent xylene.

Keywords

Fragmentation Pattern Pyrolysis Temperature Deposition Chamber Pyrolysis Zone NIST Chemistry WebBook 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • Jeffrey B. Fortin
    • 1
    • 2
  • Toh-Ming Lu
    • 3
  1. 1.Department of Engineering ScienceRensselaer Polytechnic InstituteTroyUSA
  2. 2.GE Global Research CenterNiskayunaUSA
  3. 3.Department of PhysicsRensselaer Polytechnic InstituteTroyUSA

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