Many applications and instruments require the optical filters to be used in the ultraviolet, deep ultraviolet, or even far ultraviolet wavelength ranges. These applications include deep-UV focal-plane arrays for military applications, electrical spark imaging, water purification, blood chemistry analysis, and the chemical evaluation of foods, pollutants, and gases. As the wavelength of light becomes shorter in the ultraviolet range, existing optical filters (described in section 3.4 of this book) suffer from numerous disadvantages, such as poor optical performance, limited physical longevity, high autofluorescence, poor imaging quality of transmitted radiation, and transmitted wavelength instability.
KeywordsSilicon Wafer Pore Wall Spectral Dependence Waveguide Mode Loss Coefficient
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