Surface-Micromachined Mirrors

  • Robert Conant
Part of the The Springer International Series in Microsystems book series (MICT, volume 12)

Abstract

Surface micromachining is a set of fabrication processes derived from planar integrated-circuit fabrication technologies that have been adapted to make free-standing mechanical structures. Surface micromachined devices were made in the late 1960’s by Nathanson [31], and the foundations for the polysilicon surface-micromachining process were laid by Muller and Howe in 1982 [32]. Steps in the fabrication process include, but are not limited to:

Keywords

Fatigue Dioxide Torque Epoxy Nitride 

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Copyright information

© Springer Science+Business Media New York 2003

Authors and Affiliations

  • Robert Conant

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