Surface micromachining is a set of fabrication processes derived from planar integrated-circuit fabrication technologies that have been adapted to make free-standing mechanical structures. Surface micromachined devices were made in the late 1960’s by Nathanson , and the foundations for the polysilicon surface-micromachining process were laid by Muller and Howe in 1982 . Steps in the fabrication process include, but are not limited to:
KeywordsResonant Frequency Dynamic Deformation Comb Drive Mirror Position Coupling Linkage
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