Thermometry Techniques for Microscale Heat Convection Measurements
Quantitative analysis of heat convection requires measurements of the relevant physical properties. Some integral properties, such as flow rate, can be measured by external means. However, local properties, such as temperature distribution, can be measured with adequate resolution and accuracy only by utilizing integrated sensors. A variety of microsensors have been developed for the study of heat transfer. In this chapter, two examples of microsensors will be described: thermoresistors for temperature distribution and capacitive sensors for void fraction measurements.
KeywordsDoping Concentration Void Fraction Measured Capacitance Parasitic Capacitance Capacitive Sensor
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