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Verification and Testing

  • Francis E. H. Tay
Part of the Microsystems book series (MICT, volume 10)

Abstract

An experimental set-up has been specially designed and built to evaluate the performance and yield of the prototype micropumps The schematic for the set-up is given in Fig. 5-1 and photographs of the actual set-up is given in Figs. 5-2 to 5-4. The set-up can also be used to test other common microfluidics devices such as microvalves, microflow-sensor and microchannels.

Keywords

Piezoelectric Actuator Design Rule Maximum Deflection Actuation Voltage Wafer Bonding 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media Dordrecht 2002

Authors and Affiliations

  • Francis E. H. Tay
    • 1
  1. 1.The National University of SingaporeSingapore

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