Verification and Testing
An experimental set-up has been specially designed and built to evaluate the performance and yield of the prototype micropumps The schematic for the set-up is given in Fig. 5-1 and photographs of the actual set-up is given in Figs. 5-2 to 5-4. The set-up can also be used to test other common microfluidics devices such as microvalves, microflow-sensor and microchannels.
KeywordsPiezoelectric Actuator Design Rule Maximum Deflection Actuation Voltage Wafer Bonding
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