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Surface Topography Filtering

  • P. J. Sullivan
Chapter

Abstract

We have seen from Chapter 3 that measuring a surface implicitly involves filtering the surface. In other words it is impossible to measure a surface without applying a filter to the measurand. Examples of filters encountered in surface topography measurement systems include:
  1. 1.

    mechanical — e.g. a skid, stylus radius, traverse length;

     
  2. 2.

    electrical — sampling rate, 2RC, CCD pixel transfer function;

     
  3. 3.

    digital — convolution filtering.

     

Keywords

Root Mean Square Impulse Response Surface Topography Finite Impulse Response Gaussian Filter 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media Dordrecht 2001

Authors and Affiliations

  • P. J. Sullivan

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