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Topography instrumentation

  • L. Blunt
  • B.-G. Rosén
Chapter

Abstract

The previous chapters have made references to surface data without going into any detail on the techniques used to measure surfaces, their advantages and the nature of the data captured. There are a wide variety of data capture techniques each with its advantages and limitations — these will be considered in this chapter.

Keywords

Atomic Force Microscope Interference Microscope Lens Mould Focus Detection Stylus Instrument 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    Danish Micro Engineering A/S, Herlev, DenmarkGoogle Scholar

Copyright information

© Springer Science+Business Media Dordrecht 2001

Authors and Affiliations

  • L. Blunt
  • B.-G. Rosén

There are no affiliations available

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