An Automated EBSD Acquisition and Processing System
An automated EBSD system is a combination of hardware and software designed to operate in harmony. The hardware combines pattern acquisition using a specialized camera and electron image acquisition from the SEM. The software controls data acquisition and processing. The standard SEM image may be used as a reference image, or better, that produced by a dedicated forward scattered electron detector. Examples of the use of the camera, image and EBSD data are given to illustrate the Oxford Instruments EBSD system capabilities.
KeywordsElectron Image Misorientation Angle Inverse Pole Figure Beam Scanning Equivalent Circle Diameter
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- Randle, V., 1998, Data presentation and analysis for electron backscatter diffraction, Oxford Instruments Application note.Google Scholar