Abstract
In the last 25 years the area of man-made transducers has been enriched by integrated microtransducers, i.e. miniaturized sensors and actuators, designed and fabricated using methods reminiscent of silicon integrated circuit (IC) technology. It is a foregone conclusion that signal conditioning, compensation, and calibration of such microtransducers should be attempted by silicon integrated circuits. Microsensor compensation and calibration methodology is revisited and a comprehensive list of eight basic compensation techniques is compiled.
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Häberli, A., Baltes, H. (1997). Compensation and Calibration of IC Microsensors. In: van de Plassche, R.J., Huijsing, H.H., Sansen, W. (eds) Analog Circuit Design. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2602-2_12
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DOI: https://doi.org/10.1007/978-1-4757-2602-2_12
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