Compensation and Calibration of IC Microsensors
In the last 25 years the area of man-made transducers has been enriched by integrated microtransducers, i.e. miniaturized sensors and actuators, designed and fabricated using methods reminiscent of silicon integrated circuit (IC) technology. It is a foregone conclusion that signal conditioning, compensation, and calibration of such microtransducers should be attempted by silicon integrated circuits. Microsensor compensation and calibration methodology is revisited and a comprehensive list of eight basic compensation techniques is compiled.
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