Compensation and Calibration of IC Microsensors

  • Andreas Häberli
  • Henry Baltes


In the last 25 years the area of man-made transducers has been enriched by integrated microtransducers, i.e. miniaturized sensors and actuators, designed and fabricated using methods reminiscent of silicon integrated circuit (IC) technology. It is a foregone conclusion that signal conditioning, compensation, and calibration of such microtransducers should be attempted by silicon integrated circuits. Microsensor compensation and calibration methodology is revisited and a comprehensive list of eight basic compensation techniques is compiled.


Meijer Hemel 


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Copyright information

© Springer Science+Business Media Dordrecht 1997

Authors and Affiliations

  • Andreas Häberli
    • 1
  • Henry Baltes
    • 1
  1. 1.Physical Electronics LaboratoryETH ZurichSwitzerland

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