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Compensation and Calibration of IC Microsensors

  • Andreas Häberli
  • Henry Baltes

Abstract

In the last 25 years the area of man-made transducers has been enriched by integrated microtransducers, i.e. miniaturized sensors and actuators, designed and fabricated using methods reminiscent of silicon integrated circuit (IC) technology. It is a foregone conclusion that signal conditioning, compensation, and calibration of such microtransducers should be attempted by silicon integrated circuits. Microsensor compensation and calibration methodology is revisited and a comprehensive list of eight basic compensation techniques is compiled.

Keywords

Sensor Array Hall Sensor Redundant Measurement Correlate Double Sampling Fluxgate Sensor 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media Dordrecht 1997

Authors and Affiliations

  • Andreas Häberli
    • 1
  • Henry Baltes
    • 1
  1. 1.Physical Electronics LaboratoryETH ZurichSwitzerland

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