Advertisement

Inelastic Scattering and Beam Damage

  • David B. Williams
  • C. Barry Carter

Abstract

In the previous chapter, we discussed elastic scattering of the electron beam in which the incident electron lost no energy as it interacted with the specimen. Inelastic or energy-loss electrons are equally important and we’ll discuss the processes here, but leave the applications till later. Why are we interested in inelastic scatter? Well, inelastic scattering generates a whole range of signals, each of which can tell us more about the specimen than we can find out from the elastic electrons. The most important signals are the X-rays, inelastic electrons, and secondary electrons, and so we’ll emphasize how these signals arise. We will also discuss why these specific signals are useful to materials scientists.

Keywords

Beam Energy Inelastic Scattering Auger Electron Ionization Cross Section Inelastic Process 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

General References

  1. Inokuti, M. (1971) Rev. Mod. Phys. 43, 297.CrossRefGoogle Scholar
  2. Mott, N.F., Massey, H.S.W. (1965) The Theory of Atomic Collisions, Oxford University Press, New York.Google Scholar
  3. Wang, Z.L. (1995) Elastic and Inelastic Scattering in Electron Diffraction and Imaging, Plenum Press, New York. Covers more than inelastically scattered electrons using a more rigorous mathematical approach than in this chapter.Google Scholar

Specific References

  1. Auger, P. (1925) J. Phys. Rad. 6, 20.CrossRefGoogle Scholar
  2. Bearden, J.A. (1964) NYO-10586, US Atomic Energy Commission, Oak Ridge, Tennessee.Google Scholar
  3. Bethe, H.A. (1930) Ann. der Phys. (Leipzig) 5, 325.CrossRefGoogle Scholar
  4. Butler, E.P., Hale, K.F. (1981) “Dynamic Experiments in the Electron Microscope,” in Practical Methods in Electron Microscopy, 9 (Ed. A.M. Glauert ), Elsevier, Amsterdam.Google Scholar
  5. Dyson, R. (1990) X-rays in Atomic and Nuclear Physics, Cambridge University Press, Cambridge, United Kingdom.Google Scholar
  6. Ferrel, C.R. (1956) Phys. Rev. 101, 554.CrossRefGoogle Scholar
  7. Hobbs, L.W. (1979) in Introduction to Analytical Electron Microscopy (Eds. J.J. Hren, J.I. Goldstein, and D.C. Joy), p. 437, Plenum Press, New York.Google Scholar
  8. Joy, D.C. (1984) J. Microsc. 136, 241.CrossRefGoogle Scholar
  9. Joy, D.C., Goldstein, J.I., Romig, A.D. Jr., Eds. (1986) Principles of Analytical Electron Microscopy, p. 1, Plenum Press, New York.Google Scholar
  10. Kramers, M.A. (1923) Phil. Mag. 46, 836.Google Scholar
  11. Laidler, J.J., Mastel, B. (1975) in Physical Aspects of Electron Microscopy and Microbeam Analysis (Eds. B.M. Siegel and D.R. Beaman), p. 103, Wiley, New York.Google Scholar
  12. Moseley, H.E.G. (1914) Phil. Mag. 26, 1024.Google Scholar
  13. Powell, C.J. (1976) Rev. Mod. Phys. 48, 33.CrossRefGoogle Scholar
  14. Sawyer, L.C., Grubb, D.T. (1987) Polymer Microscopy, Chapman and Hall, New York.CrossRefGoogle Scholar
  15. Williams, K.L. (1990) X-ray Spectrometry, Allen and Unwin, London.Google Scholar
  16. Zaluzec, N.J., Mansfield, J.F. (1987) in Intermediate Voltage Microscopy and Its Application to Materials Science (Ed. K. Rajan), p. 9, Philips Electron Optics Publishing Group, Mahwah, New Jersey.Google Scholar

Copyright information

© Springer Science+Business Media New York 1996

Authors and Affiliations

  • David B. Williams
    • 1
  • C. Barry Carter
    • 2
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.University of MinnesotaMinneapolisUSA

Personalised recommendations