Abstract
You’ve now got an idea of how to acquire XEDS data from thin foils. You understand what factors may limit the information in them and what false and misleading effects may arise. Also, you know how to be sure that a certain peak is due to the presence of a certain element and the occasions when you may not be so sure. Having obtained a spectrum that is qualitatively interpretable, it turns out to be a remarkably simple procedure to convert that spectrum into quantitative data about the elements in your specimen, and this is what we describe in this chapter.
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Williams, D.B., Carter, C.B. (1996). Quantitative X-ray Microanalysis. In: Transmission Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2519-3_35
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DOI: https://doi.org/10.1007/978-1-4757-2519-3_35
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