Qualitative X-ray Analysis

  • David B. Williams
  • C. Barry Carter


It is a waste of time to proceed with quantitative microanalysis from your XEDS spectrum without first carrying out qualitative analysis. First we will show you how to choose the best operating conditions, for both the microscope and the XEDS system. Then we will explain the best way to obtain a spectrum for qualitative analysis. Qualitative analysis requires that every peak in your spectrum be identified unambiguously, and with statistical certainty, otherwise it should be ignored. So you have to acquire a spectrum with sufficient X-ray counts to allow you to draw the right conclusions with confidence. There are a couple of simple rules to follow which allow you to do this.


Escape Peak Coherent Bremsstrahlung Subsequent Quantitative Analysis Intense Spectrum Display Range 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


General References

  1. Goldstein, J.I., Newbury, D.E., Echlin, P., Joy, D.C., Romig, A.D. Jr., Lyman, C.E., Fiori, C.E., and Lifshin, E. (1992) Scanning Electron Microscopy and X-ray Microanalysis, 2nd edition, p. 341, Plenum Press, New York.Google Scholar
  2. Russ, J.C. (1984) Fundamentals of Energy Dispersive X-Ray Analysis, Butterworths, Boston.Google Scholar

Specific References

  1. Dolby, R.M. (1959) Proc. Phys. Soc. London 73, 81.CrossRefGoogle Scholar
  2. Liebhafsky, H.A., Pfeiffer, H.G., Winslow, E.H., and Zemany, P.D. (1972) X-rays, Electrons and Analytical Chemistry, p. 349, John Wiley and Sons, New York.Google Scholar
  3. Schamber, F.H. (1981) in Energy Dispersive X-ray Spectrometry (Eds. K.F.J. Heinrich, D.E. Newbury, R.L. Myklebust, and C.E. Fiori), p. 193, NBS Special Publication 604, U.S. Department of Commerce/NBS, Washington, DC.Google Scholar

Copyright information

© Springer Science+Business Media New York 1996

Authors and Affiliations

  • David B. Williams
    • 1
  • C. Barry Carter
    • 2
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.University of MinnesotaMinneapolisUSA

Personalised recommendations