In principle, all you have to do to create an AEM is to hang an XEDS detector on the side of a TEM. However, in practice it isn’t always that simple because the TEM is designed primarily as an imaging tool, and microanalysis requires different design criteria. The AEM illumination system and specimen stage are rich sources of radiation, not all of it by any means coming from the area of interest in your specimen. So you have to take precautions to ensure that the X-ray spectrum you record comes from the area you chose and can ultimately be converted to quantitative elemental information. You therefore need to understand the problems associated with the XEDS-TEM interface and find ways to maximize the useful data. We describe several tests you should perform to ensure that the XEDS-TEM interface is optimized.
KeywordsThin Specimen System Peak Collection Angle Coherent Bremsstrahlung Hole Count
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