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X-ray Spectrometry

  • David B. Williams
  • C. Barry Carter

Abstract

To use the X-rays generated when the electron beam strikes a TEM specimen, we have to detect them first and then identify them as coming from a particular element. This is accomplished by X-ray spectrometry, which is one way we can transform a TEM into a far more powerful instrument, called an analytical electron microscope (AEM). Currently, the only kind of X-ray spectrometer that we use in an AEM is an X-ray energy-dispersive spectrometer (XEDS), which comprises a detector interfaced to signal-processing electronics and a computer-controlled multichannel analyzer (MCA) display. The XEDS is a complex and rather sophisticated piece of instrumentation which takes advantage of modern semiconductor technology. The principal component of the XEDS is a semiconductor detector which has the benefit of being compact enough to fit within the confined region of the TEM stage and, in one form or another, is sensitive enough to detect all the elements above Li in the periodic table.

Keywords

Dead Time Field Effect Transistor Dead Layer Intrinsic Region Charge Pulse 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

General References

  1. Goldstein, J.I., Newbury, D.E., Echlin, P., Joy, D.C., Romig, A.D. Jr., Lyman, C.E., Fiori, C.E., and Lifshin, E. (1992) Scanning Electron Microscopy and X-ray Microanalysis, 2nd edition, Plenum Press, New York.CrossRefGoogle Scholar
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Specific References

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Copyright information

© Springer Science+Business Media New York 1996

Authors and Affiliations

  • David B. Williams
    • 1
  • C. Barry Carter
    • 2
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.University of MinnesotaMinneapolisUSA

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