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Sensor Interface Systems

  • R. Puers
  • M. Steyaert
  • W. Sansen

Abstract

At present, many efforts to integrate total sensor systems are undertaken. The objective is to integrate sensors, electronic interface circuits and digital signal processing circuitry on one single chip. In this contribution an overview of sensor interface systems is given. It will be demonstrated that the above objective is hard to achieve, and is strongly depending on the technologies involved. Some temperature, pressure and chemical interface circuits will be analyzed and discussed.

Keywords

Parasitic Capacitance Capacitive Sensor Interface Circuit Instrumentation Amplifier Loop Transfer Function 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    W.Sansen, “On the integration of an Internal Human Conditioning System”, IEEE J. Solid-State Circuits, SC-17, 1982, pp. 513–521Google Scholar
  2. 2.
    M.Steyaert, W.Sansen, “Low power monolithic signal-conditioning system”, IEEE J. Solid-State Circuits, SC-25, no. 2, 1990, pp. 609–612CrossRefGoogle Scholar
  3. 3.
    S.Gogaert, M.Steyaert, T.Van Nuland, W.Sansen, “A low power eight channel EMG measuring system with bidirectional telemetry link”, Proc. Biotelemetry XII, Italy, Sept, 1992Google Scholar
  4. 4.
    M.Steyaert, W.Sansen, Z.Chang, “A micropower, low noise monolithic instrumentation amplifier for medical purpose”, IEEE J. Solid-State Circuits, SC-22, 6, 1987, pp 1163–1168CrossRefGoogle Scholar
  5. 5.
    H.Allen, J.Knutti, “A fully integrated RF actuated battery controller”, Proc. ISSCC, New-York, 1981, pp. 166–167.Google Scholar
  6. 6.
    W.Sansen, B.Puers, R.Vereecken, “Realization of a pressure telemetry capsule for cystometry”, IEEE Proc.1984 Frontiers Eng. Comp. Health Care, 1984, pp. 711–714.Google Scholar
  7. 7.
    A.Spaepen, M.Wouters, W.Sansen, M.Steyaert, “An Integrated System for Muscle Strength Testing and Exercise”, Proc. Eng. Medicine Biology Society, Boston Nov. 13–16, 1987, pp. 1069–1070Google Scholar
  8. 8.
    M.Steyaert, S.Gogaert, T.Van Nuland, W.ansen,“A low power portable telemetry system for eight channel EMG measurements”, Proc. IEEE Engineering In Medicine and Biology Society, EMBS’91, Vol. 13, No. 4, 1991, pp. 1711–1712.Google Scholar
  9. 9.
    B. Puers, A.Vanden Bossche, E. Peeters, W.Sansen, “An implantable pressure sensor for use in cardiology”, Sensors Actuators, Vol. A, 23, 1990, pp. 944–947.Google Scholar
  10. 10.
    E.Spiegel, et aL “A CMOS sensor and signal conversion chip for monitoring arterial blood pressure and temperature” Proc. IEEEISSCC’92, San Francisco, Feb. 1992, pp. 126–127Google Scholar
  11. 11.
    B.Puers, P.Wouters, K.Van Schuylenbergh, M.De Cooman, W.Sansen, V.Goedseels, R.Geers, B.Truyen, K.Goosens, H.Villé, “An intelligent data-acquisition and control unit for animal husbandry welfare using telemetry links”, Biotelemetry XI, Eds. A.Uchiyama, C.Amlaner, Waseda University Press, Tokyo, Japan, 1991, pp. 141–145.Google Scholar
  12. 12.
    P.Wouters, M.De Cooman, K.Van Schuylenbergh, B.Puers, W.Sansen, “Injectable biotelemetry CMOS chip for identification and temperature measurement system”, Proc. ESSCIRC’91, Italy Sept 1991, pp. 45–48Google Scholar
  13. 13.
    Data Book Analog Devices AD590/ AD592; National Semiconductor LM135/LM235/ LM335Google Scholar
  14. 14.
    M.J.S.Smith, L.Bowman, J.D.Meindl, “Analysis, design and performance of a capacitive pressure sensor IC”, IEEE Trans. Biomed. Eng., vol. BME-33, N° 2,. Feb 1986, pp. 163–174.Google Scholar
  15. 15.
    S.K.Clark, KD.Wise, “Pressure sensitivity in anisotropically etched thin diaphragm pressure sensors”, IEEE Trans. El. Dev., vol. ED-26, N° 12, Dec 1979, pp. 1887–1895.Google Scholar
  16. 16.
    Y.S.Lee, KD.Wise, “A batch-fabricated silicon capacitive pressure sensor with low temperature sensitivity”, IEEE Trans. El. Dev., vol. ED-29, N° 1, Jan 1982, pp. 42–56.Google Scholar
  17. 17.
    T.Jackson, M.Tischler, K.Wise: “ An electrochemical P-N junction etchstop for the formation of silicon microstructures”, IEEE Electr. Dev. Letters, EDL-2, 1981, pp. 4445Google Scholar
  18. 18.
    B.Puers, E.Peeters, W.Sansen: “CAD tools in mechanical sensor design”, Sensors and Actuators, 17,1989, pp. 423429.Google Scholar
  19. 19.
    G.W.Wallis, D.I.Pomerantz: “Field assisted glass-metal sealing”, J.Appl. Phys., 40, N°10, Sept 1969, pp. 3946–3949.Google Scholar
  20. 20.
    A.Hanneborg, P.Ohlkers, “A capacitive silicon pressure sensor with low TCO and high long-term stability”, Sensors and Actuators, A2123, 1990, pp. 151–154.Google Scholar
  21. 21.
    K. Petersen, “Silicon as a mechanical material”, Proc. IEEE, 70, 5, 1982, pp. 420–457.CrossRefGoogle Scholar
  22. 22.
    B.Puers, E.Peeters, A.Vanden Bossche, W.Sansen, “A capacitive pressure sensor with low impedance output and active suppression of parasitic effects”, Sensors and Actuators, Vol. A, 21, 1990, pp.108114.Google Scholar
  23. 23.
    W. Sansen, M. Steyaert, “VLSI Technology and Sensor Interface Circuits”, in ‘Implantable sensors for Prosthesis Systems’, Ed. W.Ko, Futura Publ. Comp., 1985.Google Scholar
  24. 24.
    I. Lauks, J. Van der Spiegel, W. Sansen, M. Steyaert, “Multispecies Integrated Electrochemical Sensors With On-chip CMOS Circuitry”, IEEE Proc. Transducers 1985, pp 122–124Google Scholar
  25. 25.
    M. Lambrechts, W.Sansen, “Biosensors: Micro-electrochemical Devices”, IOP Publishers, Adam Hilger, London, 1992Google Scholar
  26. 26.
    M. Lambrechts, J. Suls, W. Sansen, “Silver Multi-layers for Planar Ag/AgCI reference Electrodes”, IEEE Solid-State Sensors Workshop, Hilton Head, June 1986.Google Scholar
  27. 27.
    L.Faulkner, A.Bard, “Electrochemical methods: fundamentals and applications”, 1980, Wiley and Sons, New York.Google Scholar

Copyright information

© Springer Science+Business Media Dordrecht 1994

Authors and Affiliations

  • R. Puers
    • 1
  • M. Steyaert
    • 1
  • W. Sansen
    • 1
  1. 1.K.U.Leuven, ESAT-MICASHeverleeBelgium

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