Lasers in Thin Films Deposition
Laser sources are successfully utilized in thin film deposition: applications include thickness monitoring of dielectric thin films, deposition of compounds, fabrication of layers with spatially varying thickness, and generation of small patterns. In this paper I will describe some applications in this area, developed and used in our laboratory.
KeywordsThin Film Deposition Dielectric Thin Film Laser Beam Intensity Multilayer Mirror Substrate Reflectivity
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