Lasers in Thin Films Deposition

Part of the Ettore Majorana International Science Series book series (EMISS, volume 35)


Laser sources are successfully utilized in thin film deposition: applications include thickness monitoring of dielectric thin films, deposition of compounds, fabrication of layers with spatially varying thickness, and generation of small patterns. In this paper I will describe some applications in this area, developed and used in our laboratory.


Thin Film Deposition Dielectric Thin Film Laser Beam Intensity Multilayer Mirror Substrate Reflectivity 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    V. Daneu, Optical Thickness Monitor for Thin Film Deposition, Appl. Opt., 14, 962 (1975)ADSGoogle Scholar
  2. 2.
    D. H. Harrison, Interference Coatings — Practical Considerations, Proc. Soc. Photo-Optical Instr. Eng., 1, Vol. 50, “Optical Coatings” (1974)Google Scholar
  3. 3.
    R. Hermann and A. Zöller, Automated optical coating processes with optical thickness monitoring, SPIE, 2, Vol.652, “Thin Film Technologies II” (1986)Google Scholar
  4. 4.
    M. Lardon and H. Selhofer, Thin film production with a new fully automated optical thickness monitoring system, SPIE, 10, Vol. 652, “Thin Film Technologies II” (1986)Google Scholar
  5. 5.
    C. Calì, V. Daneu, A. Orioli, and S. Riva-Sanseverino, Flash evaporation of compounds with a pulsed-discharge CO2 laser, Appl. Opt., 15, 1327 (1976)ADSCrossRefGoogle Scholar
  6. 6.
    C. Amone, C. Calì and S. Riva-Sanseverino, Laser evaporation technique for CdS thin film deposition, Technical Digest of 1984 IEEE International Workshop on “Integrated Optical and related technologies for signal processing”, Sep. 10–11, 1984, Florence, ItalyGoogle Scholar
  7. 7.
    P. Lavigne, N. McCarty and J. Demers, “Design and characterization of complementary Gaussian reflectivity mirrors”, Appl. Opt., 24, 2581 (1985)ADSCrossRefGoogle Scholar
  8. 8.
    C. Zizzo, C. Amone, C. Calì and S. Sciortino, “Fabrication and characterization of tuned Gaussian mirrors for visible and near infrared”, to be published in Optics Letters.Google Scholar
  9. 9.
    C. Amone, V. Daneu and S. Riva-Sanseverino, “Effect of laser light on the sticking coefficient in ZnS thin-film growth”, Appl. Phys. Lett., 37, 1012 (1980)ADSCrossRefGoogle Scholar
  10. 10.
    C. Amone, C. Calì, M. L. Rimicci and S. Riva-Sanseverino, “Laser Film thickness modulation and induced small pattern generation”, Joum. Non-Cryst. Solids, 47, 263 (1982)ADSCrossRefGoogle Scholar
  11. 11.
    C. Amone, C. Calì and S. Riva-Sanseverino, “Study of photo-induced thin film growth on CdS substrates”, Proc. of MRS: Laser- Controlled Chemical Processing of Surfaces, Elsevier Science Publishing Co., 29 (1984)Google Scholar

Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • C. Cali
    • 1
  1. 1.Dipartimento di Ingegneria ElettricaViale delle ScienzePalermoItaly

Personalised recommendations