Advertisement

Interaction of Pulsed Laser Beams with Solid Surfaces: Laser Heating and Melting

  • A. M. Malvezzi
Part of the Ettore Majorana International Science Series book series (EMISS, volume 35)

Abstract

Experiments on laser interaction with solid surfaces have been performed since the development of laser sources. It was readily recognized that heat was efficiently generated within an absorption depth from the surface. In this way extremely high temperature could be generated with little energy, leading to melting, evaporation and ultimately ionization of thin layers. These phenomena are exploited in a great variety of ways in many fields of science and technology. Laser cutting and drilling and surface heat treatment find growing industrial applications. Laser annealing of semiconductors has opened new possibilities in the fabrication of highly controlled high speed electronic components. Rapid resolidification (thermal quenching) after pulsed laser melting of metals and compounds has provided a mean of obtaining new exotic materials. This field of studies has taken full advantage of progress in ultrashort laser pulse generation, high temporal resolution being mandatory in separating these effects occurring in a wide range of time scales.

Keywords

Laser Pulse Carrier Density Laser Fluence Lattice Temperature Surface Melting 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    “Laser Solid Interactions and Laser Processing”, S. O. Ferris, H. J. Lemay and J. M. Poate, American Institute of Physics, New York (1979)Google Scholar
  2. 2.
    “Laser and Electron Beam Processing of Materials”, C. W. White and P. S. Peercy, Academic Press, New York (1980)Google Scholar
  3. 3.
    Laser and Electron Beam Solid Interactions and Materials Processing J. F. Gibbons, L. D. Hess and T. W. Sigman, Elsevier North-Holland, New York, 1981, Mat. Res. Soc. Symp. Proc., 1 (1981)Google Scholar
  4. 4.
    “Laser and Electron Beam Interactions with Solids”, B. R. Appleton and G. K. Celler, Elsevier Nort-Holland, New York, 1982, Mat. Res. Soc. Symp. Proc, 4 (1982)Google Scholar
  5. 5.
    “Laser — Solid Interactions and Transient Thermal Processing of Materials”, J. Narayan, W. L. Brown and R. A. Lemons, Elsevier North-Holland, New York, 1983, Mat. Res. Soc. Symp. Proc, 13 (1983)Google Scholar
  6. 6.
    Laser Annealing of Semiconductors, J. M. Poate and J. W. Mayer, Academic Press, New York (1982)Google Scholar
  7. 7.
    “Energy Beam-Solid Interactions and Transient Thermal Processing”, J. C. C. Fan and N. H. Johnson, Elsevier North-Holland, New York, 1985, Mat. Res. Soc. Symp. Proc, 23 (1984)Google Scholar
  8. 8.
    “Energy Beam-Solid Interactions and Transient Thermal Processing”, D. K. Biegelsen and C. V. Shank, Elsevier North-Holland, New York, 1985, Mat. Res. Soc. Symp. Proc, 35 (1985)Google Scholar
  9. 9.
    “Beam-Solid Interactions and Phase Transformations”, H. Kurz, G. L. Olson, J. M. Poate, Material Research Society, Pittsburgh, 1986, Mat. Res. Soc Symp. Proc, 51 (1986)Google Scholar
  10. 10.
    N. W. Ashcroft, N. D. Mermin, “Solid State Physics”, Saunders College, Philadelphia (1976)Google Scholar
  11. 11.
    F. Wooten, “Optical Properties of Solids”, Academic Press, New York, (1972)Google Scholar
  12. 12.
    M. Born and E. Wolf, “Principles of Optics”, Pergamon Press, Oxford (1980)Google Scholar
  13. 13.
    M. I. Kaganov, I. M. Lifshitz, L. V. Tanatarov, Sov. Phys. JETP 4, (1957)Google Scholar
  14. 14.
    A. Wilson, “The theory of metals”Google Scholar
  15. 15.
    J. G. Fujimoto, J. M. Liu, E. Ippen, N. Bloembergen, Phys. Rev. Letters, 53:1837 (1984)ADSCrossRefGoogle Scholar
  16. 16.
    G. L. Eesley, Phys. Rev. Letters, 51:2140 (1983)ADSCrossRefGoogle Scholar
  17. 17.
    H. Elsayed-All, M. Pessot, T. Norris and G. Mourou, in:“Ultrafast Phenomena V”, edited by G. R. Fleming and A. E. Siegman (Springer-Verlag, Berlin), p. 264 (1986)Google Scholar
  18. 18.
    R. W. Schoenlein, W. Z. Lin, J. G. Fujimoto and G. L. Eesley, in: “Ultrafast Phenomena V”, edited by G. R. Fleming and A. E. Siegman (Springer-Verlag, Berlin) p.260, (1986)Google Scholar
  19. 19.
    D. Pines and D. Böhm, Phys. Rev. 85:338 (1952)MathSciNetADSMATHCrossRefGoogle Scholar
  20. 20.
    E. M. Conwell and M. O. Vassel, IEE Trans. Electron. Devices, 13:22 (1966)CrossRefGoogle Scholar
  21. 21.
    D. von der Linde, J. Khul and H. Klingenberg, Phys. Rev. Letters, 44:1505 (1980)ADSCrossRefGoogle Scholar
  22. 22.
    J. A. Kash and J. C. Tsang, Phys. Rev. Letters, 54:2151 (1985)ADSCrossRefGoogle Scholar
  23. 23.
    A. M. Malvezzi, J. M. Liu and N. Bloembergen, Appl. Phys. Lett., 45:1019 (1984)ADSCrossRefGoogle Scholar
  24. 24.
    A. J. Taylor, D. J. Erskine and C. L. Tang, Appl. Phys. Lett., 43:989 (1983)ADSCrossRefGoogle Scholar
  25. 25.
    C. L. Tang and D. J. Erskine, Phys. Rev. Letters, 51:840 (1983)ADSCrossRefGoogle Scholar
  26. 26.
    W. Z. Lin, J. G. Fujimoto, E. P. Ippen and R. A. Logan, in: “Ultrafast Phenomena V”, edited by G. R. Fleming and A. E. Siegman (Springer-Verlag, Berlin), p. 193 (1986)Google Scholar
  27. 27.
    J. L. Oudar, D. Hulin, A. Migus, A. Antonetti, F. Alexandre, Phys. Rev. Letters, 55:2074 (1985)ADSCrossRefGoogle Scholar
  28. 28.
    E. Yoffa, Phys. Rev., B 21:2415 (1980)ADSCrossRefGoogle Scholar
  29. 29.
    A. M. Malvezzi, H. Kurz and N. Bloembergen, Appl. Phys., A 36:143 (1985)Google Scholar
  30. 30.
    R. W. Schoenlein, W. Z. Lin, S. D. Brorson, E. P. Ippen, J. G. Fujimoto and G. L. Eesley, XV International Conference on Quantum Electronics, Baltimore, Md April 27, May 1 (1987) paper TuDD4Google Scholar
  31. 31.
    D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. E. Slusher and J. A. Golovchenko, Appl. Phys. Lett., 33:437 (1978)ADSCrossRefGoogle Scholar
  32. 32.
    F. Spaepen, Science Magazine, february 1987 33.Google Scholar
  33. 32a.
    H. M. van Driel, L. A. Lomprè and N. Bloembergen, Appl. Phys. Lett., 44:285 (1984)ADSCrossRefGoogle Scholar
  34. 34.
    N. Bloembergen, R. K. Change, S. S. Jha and C. H. Lee, Phys. Rev., 174:813, (1968)ADSCrossRefGoogle Scholar
  35. 35.
    A. M. Malvezzi, H. Kurz and N. Bloembergen, ref. 8, p. 75Google Scholar
  36. 36.
    L. A. Lomprè, J. M. Liu, H. Kurz and N. Bloembergen, Appl. Phys.Lett., 43:168 (1983)ADSCrossRefGoogle Scholar
  37. 37.
    M. C. Lee, H. W. Loo, A. Aydinil, G. J. Trott, A. Compaan and E. B. Hale, Solid State Comm., 46:677 (1983)ADSCrossRefGoogle Scholar
  38. 38.
    C. A. McDonald, A. M. Malvezzi and F. Spaepen, rf. 9, p. 271Google Scholar
  39. 39.
    P. Baerl, J. Appl. Phys., 50:788 (1979)ADSCrossRefGoogle Scholar
  40. 40.
    A. Lietola, F. Gibbons, Appl. Phys. Lett., 46:624 (1982)ADSCrossRefGoogle Scholar
  41. 41.
    F. Spaepen and D. Turnbull in ref. 6, p. 15Google Scholar
  42. 42.
    N. Bloembergen, ref. 9, p. 3Google Scholar
  43. 43.
    H. Kurz and N. Bloembergen, ref. 8, p.332Google Scholar
  44. 44.
    C. V. Shank and M. C. Downer, ref. 9, p.15Google Scholar
  45. 45.
    P. A. Wolff, Phys. Rev. Letters, 24:266 (1970)ADSCrossRefGoogle Scholar
  46. 46.
    M. Rasolt, Phys. Rev., B2:1166 (1986)ADSGoogle Scholar
  47. 47.
    M. Rasolt and F. Perot, to be publishedGoogle Scholar
  48. 48.
    M. Rasolt and H. Kurz, Phys. Rev. Letters, 54:722 (1986)ADSCrossRefGoogle Scholar
  49. 49.
    A. M. Malvezzi, C. Y. Huang, H. Kurz and N. Bloembergen, ref. 9, p.201Google Scholar
  50. 50.
    C. V. Shank, R. Yen and C. Hirliman, Phys. Rev. Letters, 50:454 (1983)ADSCrossRefGoogle Scholar

Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • A. M. Malvezzi
    • 1
  1. 1.Division of Applied SciencesHarvard UniversityCambridgeUSA

Personalised recommendations