Laser Processing of Semiconductors
A wide variety of potential applications for lasers in the manufacture of semiconductors and semiconductor devices have been investigated in recent years. The advantages of laser processing in semiconductor preparation and utilization derive from the ability of laser sources to provide concentrated sources of heat in localized regions with extremely small areas. At the same time, beam scanning or stepping can allow scanning of large areas.
KeywordsOhmic Contact Laser Processing Laser Annealing Silicide Formation Metal Silicide
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