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Laser Processing of Semiconductors

  • W. W. Duley

Abstract

A wide variety of potential applications for lasers in the manufacture of semiconductors and semiconductor devices have been investigated in recent years. The advantages of laser processing in semiconductor preparation and utilization derive from the ability of laser sources to provide concentrated sources of heat in localized regions with extremely small areas. At the same time, beam scanning or stepping can allow scanning of large areas.

Keywords

Ohmic Contact Laser Processing Laser Annealing Silicide Formation Metal Silicide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1983

Authors and Affiliations

  • W. W. Duley
    • 1
  1. 1.York UniversityTorontoCanada

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