The Molecular Beam Epitaxial Growth of GaAs on Si
The aim of this project is not only to grow high quality GaAs onto an Si substrate, but also to gain an understanding of the growth process and the physics of the GaAs/Si interface.
KeywordsState Physics High Resolution Growth Process Molecular Beam Epitaxial Growth
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
© Plenum Press, New York 1988