Advertisement

The Structure of Mo/Ta Superlattices

  • J. L. Makous
  • C. M. Falco

Abstract

We grew superlattices of Mo and Ta on sapphire substrates using magnetically enhanced de triode sputtering, where a rotating substrate table alternately passes over the targets to create multilayers. Microprocessor control of the sputtering process allowed us to keep layer thicknesses constant to ±0.3%. The wavelengths were modulated by an integer number, n, of atomic planes of Mo and Ta, where n ranged from a value of 153 (λ = 700 Å) to the monolayer limit of 1 (λ = 4.57 Å).

Keywords

Layer Thickness Long Range Multilayered Structure Integer Number Coherence Length 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • J. L. Makous
    • 1
  • C. M. Falco
    • 1
  1. 1.Department of PhysicsUniversity of ArizonaTucsonUSA

Personalised recommendations