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X-Ray Diffraction Studies of Nb/Ta Superlattices

  • F. Lamelas
  • Hui He
  • R. Clarke

Abstract

We have grown high crystal quality niobium/tantalum multilayer super-lattices in an MBE system. The films were deposited from electron beam hearths operating at 3–4 kilowatts onto rotating sapphire substrates held at a variety of temperatures ranging from 775°C to 1000°C. With liquid nitrogen filled cryopanels in the deposition chamber, pressures were held at 10-9 to 10-8 Torr during growth.

Keywords

Sapphire Substrate Deposition Chamber Crystalline Order High Crystal Quality Epitaxial Relationship 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • F. Lamelas
    • 1
  • Hui He
    • 1
  • R. Clarke
    • 1
  1. 1.Department of Physics, Randall LaboratoryThe University of MichiganAnn ArborUSA

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