Multilayer Structures: Atomic Engineering in its Infancy

  • Troy W. BarbeeJr.


Thin film deposition processes were understood to be “atom by atom” in nature very early in the development of the appropriate synthesis technologies. This understanding undoubtedly resulted in a leap of imagination to a time when the atomic positions of chemically specific species necessary to achieve a scientific result, or to fulfill a technologically significant need, could be theoretically determined and then experimentally realized—in a word, engineered. Hence “atomic engineering” requires that we know which atoms go in which places for a given reason, and further that we be able to achieve physically the desired result in a systematic and reproducible manner. In this paper a perspective on materials engineering is given as background for a discussion of atomic engineering—now and in the future. The current status of multilayer science and technology will then be reviewed in this context. Important opportunities are discussed and a short summary is presented.


Molecular Beam Epitaxy Multilayer Structure Deposition Surface Reflection High Energy Electron Diffraction Deposition Product 
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Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • Troy W. BarbeeJr.
    • 1
  1. 1.Chemistry and Materials Science DepartmentLawrence Livermore National LaboratoryLivermoreUSA

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