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Application of Pellicles in Clean Surface Technology

  • Pedro Lilienfeld

Abstract

The protection of optically critical surfaces against the effects of particle contamination by means of transparent barriers has been a long-established approach applied to a broad range of cases, ranging from combustion monitoring(1) to space-borne(2) sensing. Such protective transparent barriers can take the form of cleanable windows, as in the case of the rather prosaic automotive windshield/wiper, or of flow screens, typified by the clean-air curtains incorporated in several types of gas(1) and aerosol(3) monitoring instruments.

Keywords

Standoff Distance Optical Data Storage Particle Contamination Illumination Wavelength Integrate Circuit Fabrication 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1987

Authors and Affiliations

  • Pedro Lilienfeld
    • 1
  1. 1.MIE, Inc.BedfordUSA

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