High Quality Non-contact Measurement Using Capacitance Gauges
This paper describes a series of tests designed to demonstrate the ability of small capacitance gauges to detect and measure surface defects.
Scans across rectangular grooves of various dimensions.
A three dimensional raster scan image of an actual defect caused by dry rubbing.
KeywordsElectrostatic Field Depth Ratio Deep Groof Stylus Measurement Noncontact Measurement
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