Surface Analysis with the Electron Probe

  • Gudrun A. Hutchins
Part of the Developments in Applied Spectroscopy book series (DAIS, volume 7a)


A number of analyses are described to illustrate the usefulness of electron probe microanalysis in the characterization of surfaces. The examples include segregation of impurities, effects of surface treatment, and studies of thin films.


Electron Probe Silica Film Soft Radiation Mass Thickness Tantalum Foil 


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  1. 1.
    G. A. Hutchins, The Electron Microprobe, T. D. McKinley, K. F. J. Heinrich, D. B. Wittry, eds., John Wiley and Sons, New York (1966), p. 390.Google Scholar
  2. 2.
    A. R. Wolter, J. Appl Phys. 36, 2377 (1965).CrossRefGoogle Scholar
  3. 3.
    P. A. Gould, Brit. J. Appl Phys. 6, 1481 (1965)CrossRefGoogle Scholar

Copyright information

© Chicago Section of the society for Applied Spectroscopy 1969

Authors and Affiliations

  • Gudrun A. Hutchins
    • 1
  1. 1.Sprague Electric CompanyNorth AdamsUSA

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