Investigation of a Method of Obtaining Niobium Carbide Powder and Coatings from the Vapor Phase
The possibility of obtaining niobium carbide in the form of powder and coatings by deposition from a vapor mixture in the temperature range 1500–1900°C has been investigated. The rate of deposition has been studied in relation to the concentration of the reagents, the substrate temperature, and the rate of hydrogen supply. The highest deposition rate for niobium carbide was found to occur at an optimum ratio of hydrogen to total chlorides of 10:1. The possibility of depositing coatings on graphite, tungsten, molybdenum, and niobium was also investigated.
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