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High Purity Water for Semiconductor Manufacturing

  • E. Krapf
  • R. Preisser
Part of the Earlier Brown Boveri Symposia book series (EBBS)

Abstract

Ultrapure water is an essential chemical and material for the production of semiconductor devices. Impurities in the process water such as bacteria, organics, ionic contaminations and particles are a potential cause of reduced device yield and reliability failures.

Keywords

Breakdown Voltage High Purity Water Ionic Contamination Central Monitoring Station Pyrogen Test 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • E. Krapf
    • 1
  • R. Preisser
    • 1
  1. 1.IBMSindelfingenWest-Germany

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