Hot Carrier Design Considerations in MOS Nonvolatile Memories

  • Yoshiaki Kamigaki
  • Eiji Takeda

Abstract

Floating-gate type nonvolatile semiconductor memories (NVSMs) were first introduced and applied by Kahng and Sze in 1967 [1]. The metal-nitride-oxide-silicon (MNOS) structure was first reported by Frohman-Bentchkowsky and Lenzlinger in 1969 [2]. Since then, three families of NVSMs [3–5] have been developed: EPROMs (Erasable and Programmable Read-Only Memories), EEPROMs (Electrically Erasable and Programmable Read-Only Memories), and flash memories (bulk electrically erasable).

Keywords

Phosphorus Dioxide Arsenic Boron Nitride 

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Copyright information

© Van Nostrand Reinhold 1992

Authors and Affiliations

  • Yoshiaki Kamigaki
    • 1
  • Eiji Takeda
    • 1
  1. 1.Central Research LaboratoryHitachi Ltd.TokyoJapan

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