Advertisement

A Morphological Study of Silicon Carbide Prepared by Chemical Vapor Deposition

  • P. Tsui
  • K. E. Spear
Part of the Materials Science Research book series (MSR, volume 17)

Abstract

Surface morphologies of SiC deposits obtained via chemical vapor deposition (CVD) were studied as functions of substrate surface temperature and the concentration of the silicon and carbon source material, methyltrichlorosilane (MTS).Substrates of graphite and α-SiC crystals were used. Explanations of the observed morphologies on graphite substrates and their marked changes with temperature are given in terms of chemical kinetics and mass transport arguments. The results of thermodynamic calculations were used to help explain the observed morphologies of the deposits on α-SiC substrates.

Keywords

Chemical Vapor Deposition Silicon Carbide Graphite Substrate Chemical Vapor Deposition Reactor Deposit Morphology 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    J. R. Weiss and R. J. Diefendorf, pp. 488–97 in Fourth International CVD Conference Proceedings, edited by G. F. Wakefield and J. M. Blocher, The Electrochemical Society, Princeton, NJ, 1973.Google Scholar
  2. 2.
    J. Chin, P. K. Gantzel, and R. G. Hudson, Thin Solid Films, 40, 57–72 (1977).CrossRefGoogle Scholar
  3. 3.
    F. Christin, R. Naslain, and C. Bernard, pp. 499–514 in Seventh International CVD Conference Proceedings, edited by T. O. Sedgwick and H. Lydtin, The Electrochemical Society, Princeton, NJ, 1979.Google Scholar
  4. 4.
    V. J. Jennings, A. Sommer, and H. C. Chang, J. Electrochem. Soc., 113, 728–31 (1966).CrossRefGoogle Scholar
  5. 5.
    W. V. Muench and I. Pfaffeneder, Thin Solid Films, 31, 39–51 (1976).CrossRefGoogle Scholar
  6. 6.
    G. Eriksson, Acta Chim. Scand., 25, 2651–58 (1971).CrossRefGoogle Scholar
  7. 7.
    G. Eriksson, Chemica Scripta, 4, 193–94 (1973).Google Scholar
  8. 8.
    G. Eriksson, Chemica Scripta, 8 100–03 (1975).Google Scholar

Copyright information

© Plenum Press, New York 1984

Authors and Affiliations

  • P. Tsui
    • 1
  • K. E. Spear
    • 1
  1. 1.Materials Research LaboratoryThe Pennsylvania State UniversityUniversity ParkUSA

Personalised recommendations