Synthesis of Powders and Thin Films by Laser Induced Gas Phase Reactions

  • John S. Haggerty
Part of the Materials Science Research book series (MSR, volume 17)


Laser induced gas phase reactions have been used to produce highly controlled powder and thin film reaction products. Powders of Si, Si3N4 and SiC exhibit presumed ideal characteristics for consolidation into dense ceramic parts. Individual powder characteristics can be manipulated with this process while being highly efficient in terms of materials utilization and energy consumption. The CVD process permits physical, electronic and crystallographic properties to be controlled. Resulting amorphous Si films exhibit superior properties.


Laser Beam Powder Characteristic Si3N4 Powder Increase Laser Intensity Laser Induce Chemical Vapor Deposition 
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Copyright information

© Plenum Press, New York 1984

Authors and Affiliations

  • John S. Haggerty
    • 1
  1. 1.Massachusetts Institute of TechnologyCambridgeUSA

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