Experimental Evidence of the Bond Breaking Mechanism in Oxygen Secondary Ion Emission Enhancement
We have measured the Ti+ and O- secondary ion emission yields of a Ti sample exposed to oxygen. The oxygen amount at the surface was determined by measuring the OKLL Auger signal, and the chemical effect of oxygen at the surface by measuring the TiLMV and TiLMM Auger line shapes. We found that the oxidation process of Ti presents two clearly differentiated regimes characterized by a different electronic transfer mechanism from titanium to oxygen. These two regimes are also observed in the behavior of the Ti+ and O- yields showing a correlation between the ionization mechanism and the chemical surrounding of the ejected atom.
KeywordsIonization Probability Oxygen Coverage Electron Depletion 0KLL Auger Auger Yield
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- 4.M.L. Yu and N.D. Lang, Nucl. Inst. Meth. B14 (1986) 03.Google Scholar
- 7.G. Slodzian and J.F. Hennequin, C. R. Acad. S. C. Paris 263B (1966) 1246.Google Scholar
- 10.M.L. Yu, Nucl. Inst. Meth. B18 (1987) 542.Google Scholar
- 12.M.C.G. Passeggi, E.C. Goldberg and J. Ferron, Lectures Notes in Surface Sci., M. Cardona and G. Castro, eds., 319, Springer-Verlag, (1987).Google Scholar