Abstract
The in-situ measurement of mechanical stress in microelectronics packages has become desirable in recent years as a result of evolving packaging technology. In the case of integrated circuit (IC) packages, stress can be produced either through the die attachment process or through encapsulation in a molding material. In the case of chip-on-board (COB) packaging, stress can be produced by the chip coating used to protect the IC against handling damage and chemical attack. As die sizes have increased, stresses from these sources have steadily grown in magnitude, resulting in such phenomena as die cracking or shear stress-induced breakage of the die passivation and metal conductors under the passivation. In order to quantitatively determine the stress magnitudes in a packaged IC it is desirable to have a test device that can simulate the actual IC chip as closely as possible.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Smith, C. S., “Piezoresistance Effect in Germanium and Silicon,” Phys. Rev., 94, 1956, p. 42.
Mason, W. P., and R. N. Thurston, “Use of Piezoresistive Materials in the Measurement of Displacement, Force, and Torque,” J. Acoustical Soc. Am., 29, 1957, p. 1096.
Pfann, W. G., and R. N. Thurston, “Semiconducting Stress Transducers Utilizing the Transverse and Shear Piezoresistance Effects,” J. Appl. Phys., 32, 1961, p. 2008.
Tufte, O. N., and E. L. Stelzer, “Piezoresistive Properties of Silicon Diffused Layers,” J. Appl. Phys., 34, 1963, p. 313.
Spencer, J. L., W. H. Schroen, G. A. Bednarz, J. A. Bryan, T. D. Metzgar, R. D. Cleveland, and D. R. Edwards, “New Quantitative Measurements of IC Stress Introduced by Plastic Packages,” Proc. 19th Annual Reliability Physics Symposium, 1981, pp. 74–80.
Landau, L. D., and E. M. Lifshitz, Electrodynamics of Continuous Media, Pergamon Press, Oxford, 1984, pp. 86–88.
Ashcroft, N. W., and N. D. Mermin, Solid State Physics, Holt, Rinehart and Winston, New York, 1976, pp. 250–251.
Bittle, D. A., J. C. Suhling, R. E. Beaty, R. C. Jaeger, and R. W. Johnson, “Piezoresistive Stress Sensors for Structural Analysis of Electronic Packages,” J. Electronic Packaging, 113, 1991, p. 203.
Landau, L. D., and E. M. Lifshitz, Theory of Elasticity, Addison Wesley, Reading, MA, 1959, pp. 36–41.
Smith, C. S., “Macroscopic Symmetry and Properties of Crystals,” Solid State Physics, Vol. 6, F. Seitz and D. Turnbull, eds. Academic Press, New York, 1958, pp. 175–249.
Middelhoek, S., and S. A. Audet, Silicon Sensors, Academic Press, New York, 1989, pp. 105–151.
Kanda, Y., “A Graphical Representation of the Piezoresistance Coefficients in Silicon,” IEEE Trans. Electronic Devices, ED-29, 1982, p. 64.
Goldstein, H., Classical Mechanics, 2d edn., Addison Wesley, Reading, MA, 1981, pp. 128–148.
Thurston, R. N., “Use of Semiconductor Transducers in Measuring Strains, Accelerations, and Displacements,” Physical Acoustics, Vol. I, Part B, W. P. Mason, ed., Academic Press, New York, 1964, pp. 215–235.
Sze, S. M., Physics of Semiconductor Devices, 2d edn., Wiley, New York, 1981, pp. 12–16.
Chelikowsky, J. R., and M. L. Cohen, “Nonlocal Pseudopotential Calculations for the Electronic Structure of Eleven Diamond and Zinc-Blende Semiconductors,” Phys. Rev., B14, 1976, p. 556.
Herring, C., “Transport Properties of a Many-Valley Semiconductor,” Bell System Technical J, 34, 1955, p. 237.
Herring, C., and E. Vogt, “Transport and Deformation-Potential Theory for Many-Valley Semiconductors with Anisotropic Scattering,” Phys. Rev., 101, 1956, p. 944.
Keyes, R. W., “The Effects of Elastic Deformation on the Electrical Conductivity of Semiconductors,” Solid State Physics, Vol. 11, F. Seitz and D. Turnbull, eds., Academic Press, New York, 1960, pp. 149–221.
Tufte, O. N., and E. L. Stelzer, “Piezoresistive Properties of Heavily Doped n-Type Silicon,” Phys. Rev., 133A, 1964, p. 1705.
Ref. 7, pp. 36–37.
Boer, K. W., Survey of Semiconductor Physics, Van Nostrand Reinhold, New York, 1990, pp. 210–222.
Jaeger, R. J., Introduction to Microelectronic Fabrication, Vol. V in Modular Series on Solid State Devices, G. W. Neudeck and R. F. Pierret, eds., Addison Wesley, Reading MA, 1988, pp. 49–62.
Miura, H., A. Nishimura, S. Kawai, and K. Nishi, “Development and Application of the Stress Sensing Test Chip for IC Plastic Packages,” Proc. 64th Annual Meeting of the Japanese Society of Mechanical Engineers, pp. 1826–1832.
Natarajan, B., and B. Bhattacharyya, “Die Surface Stresses in a Molded Plastic Package,” Proc. 36th Electronic Components Conference, IEEE, 1986, pp. 544–551.
Lundström, P., and K. Gustafsson, “Mechanical Stress and Life for Plastic-Encapsulated Large Area Chip,” Proc. 38th Electronic Component and Technology Conference, IEEE, 1988, pp. 396–405.
Beaty, R. E., J. C. Suhling, C. A. Moody, D. A. Bittle, R. W. Johnson, R. D. Butler, and R. C. Jaeger, “Calibration Consideratons for Piezoresistive-based Stress Sensors,” Proc. 40th Electronic Component and Technology Conference, IEEE, 1990, pp. 797–806 and “Piezoresistive Coefficient Variation in Silicon Stress Sensors Using a Four-Point Bend Text Fixture,” IEEE Trans. Components, Hybrids, Manuf. Technol., CHMT-15, 1992, p. 904.
Sze, S. M., Semiconductor Technology,2d edn., McGraw-Hill, New York, 1988, Chap. 11.
Beadle, W. E., J. C. C. Tsai, and R. D. Plummer, Quick Reference Manual for Silicon Integrated Circuit Technology, Wiley, New York, 1985, pp. 4–10.
Beck, J. V., and K. J. Arnold, Parameter Estimation in Engineering and Science, Wiley, New York, 1977.
Thurston, R. N., “Use of Semiconductor Transducers,” Physical Acoustics, Vol. 1 Part B, W. P. Mason, ed., Academic Press, New York, 1964, pp. 215–235.
Gee, S. A., V. R. Akylas, and W. F. van den Bogert, “The Design and Calibration of a Semiconductor Strain Gauge Array,” 1988 IEEE Proc. Microelectronic Test Structures., IEEE, 1988, pp. 185–191.
Grove, A. S., Physics and Technology of Semiconductor Devices, Wiley, New York, 1967, pp. 321–324.
Suhling, J. C., M. T. Carey, R. W. Johnson, and R. C. Jaeger, “Stress Measurement in Microelectronic Packages Subjected to High Temperatures,” ASME Winter Annual Meeting, Dec. 1991, ASME publication AMD-Vol. 131/EEP-Vol. 1, Manufacturing Processes and Materials Challenges in Microelectronic Packaging, ASME, 1991, pp. 143–152.
Sweet, J. N., M. R. Tuck, D. W. Peterson, and D. W. Palmer, “Short and Long Loop Manufacturing Feedback Using a Multisensor Assembly Test Chip,” IEEE Trans. Components, Hybrids, Manuf. Technol., CHMT-14, 1991, p. 529.
Bastawros, A. F., and A. S. Vososhin, “In-Situ Calibration of Stress Chips,” Proc. 40th Electronic Component and Technology Conference, IEEE, 1990, pp. 791795.
Suhir, E., “Thermal Stress Failures in Microelectronic Components—Review and Extension,” Advances in Thermal Modeling of Electronic Components, Vol. 1, A. Bar-Cohen and A. D. Krans, eds., Hemisphere Publishing, New York, 1988, pp. 337–412.
van Kassel, C. G. M., S. A. Gee, and J. J. Murphy, “The Quality of Die-Attachment and Its Relationship to Stresses and Vertical Die-Cracking,” IEEE Trans. Components, Hybrids, CHMT-6, 1983, p. 414.
Groothuis, S., W. Schroen, and M. Murtuza, “Computer Aided Stress Modeling for Optimizing Plastic Package Reliability,” Proc. 23d Annual Reliability Physics Symposium, 1985, pp. 184–191.
Edwards, D. R., K. G. Heinen, S. K. Groothuis, and J. E. Martinez, “Shear Stress Evaluation of Plastic Packages,” IEEE Trans. Components, Hybrids, Manuf. Technol., CHMT-12, 1987, p. 618.
Gee, S. A., W. F. van den Bogert, and V. R. Akylas, “Strain-Gauge Mapping of Die Surface Stresses,” IEEE Trans. Components, Hybrids, Manuf. Technol., CHMT-12, 1989, p. 587.
Miura, H., A. Nishimura, S. Kawai, and G. Murakami, “Structural Effect of IC Plastic Package on Residual Stress in Silicon Chips,” Proc. 40th Electronic Component and Technology Conference, IEEE, 1990, pp. 316–321.
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1993 Van Nostrand Reinhold
About this chapter
Cite this chapter
Sweet, J.N. (1993). Die Stress Measurement Using Piezoresistive Stress Sensors. In: Lau, J.H. (eds) Thermal Stress and Strain in Microelectronics Packaging. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-7767-2_7
Download citation
DOI: https://doi.org/10.1007/978-1-4684-7767-2_7
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-7769-6
Online ISBN: 978-1-4684-7767-2
eBook Packages: Springer Book Archive