RF Plasma Deposition of YBa2Cu3O7−x Films

  • S. Patel
  • A. Shah
  • D. T. Shaw


Superconducting YBa2Cu3O7−x films have been grown on single crystal yttria stabilized zirconia by rf plasma deposition from an aqueous solution of the nitrates of Y, Ba and Cu. The as-grown films are highly c-axis oriented perpendicular to the substrate with critical temperature and current density of 85K and ~ 1 × 104 amp/cm2 at 77K, respectively. The influence of the process parameters on the microstructural and transport properties will be discussed.


Substrate Temperature Plasma Torch YBCO Film Temperature Post Annealing YBCO Single Crystal 
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Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • S. Patel
    • 1
  • A. Shah
    • 1
  • D. T. Shaw
    • 1
  1. 1.New York State Institute on SuperconductivityState University of New York at BuffaloAmherstUSA

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