Surface Passivation of Y-Ba-Cu-O Oxide Using Chemical Treatment
A novel chemical treatment was used to passivate high temperature superconducting Y-Ba-Cu-O of both bulk oxides and thin films. The water resistance of the Y-Ba-Cu-O was greatly improved after the superconductors were treated with hydrofluoric acid (HF) at room temperature. No obvious etching of the Y-Ba-Cu-O and no degradation of zero resistance temperature were observed after the Y-Ba-CuO superconductors were treated with 49% HF or buffer HF commonly used in semiconductor technology for etching silicon dioxide or silicon nitride. The formation of a thin layer of amorphous fluoride on the film surface could be related to the improved water resistance of Y-Ba-Cu-O after HF treatment. It seems that HF destroys the corrosion products formed on the Y-Ba-Cu-O surface due to the reaction of the Y-Ba-Cu-O with water vapor or carbon dioxide in air.
KeywordsSilicon Nitride Water Immersion Surface Passivation Film Resistance Bulk Oxide
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