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Surface Passivation of Y-Ba-Cu-O Oxide Using Chemical Treatment

  • Q. X. Jia
  • W. A. Anderson

Abstract

A novel chemical treatment was used to passivate high temperature superconducting Y-Ba-Cu-O of both bulk oxides and thin films. The water resistance of the Y-Ba-Cu-O was greatly improved after the superconductors were treated with hydrofluoric acid (HF) at room temperature. No obvious etching of the Y-Ba-Cu-O and no degradation of zero resistance temperature were observed after the Y-Ba-CuO superconductors were treated with 49% HF or buffer HF commonly used in semiconductor technology for etching silicon dioxide or silicon nitride. The formation of a thin layer of amorphous fluoride on the film surface could be related to the improved water resistance of Y-Ba-Cu-O after HF treatment. It seems that HF destroys the corrosion products formed on the Y-Ba-Cu-O surface due to the reaction of the Y-Ba-Cu-O with water vapor or carbon dioxide in air.

Keywords

Silicon Nitride Water Immersion Surface Passivation Film Resistance Bulk Oxide 
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Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • Q. X. Jia
    • 1
  • W. A. Anderson
    • 1
  1. 1.Department of Electrical and Computer Engineering Institute on SuperconductivityState University of New York at BuffaloAmherstUSA

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