Advertisement

Processing and Substrate Effects on YBaCuO Thin Films Formed by Rapid Thermal Annealing of Cu/BaO/Y2O3 Layered Structures

  • Q. Y. Ma
  • M. T. Schmidt
  • T. J. Licata
  • D. V. Rossi
  • E. S. Yang
  • Chin-An Chang
  • C. E. Farrell

Abstract

YBaCuO superconducting thin films have been formed by rapid thermal annealing (RTA) of Cu/BaO/Y2O3 layered structures. The films were deposited on various substrates (including MgO, Al2O3 and Si) by electron-beam evaporation. The film properties strongly depend on the annealing conditions as well as the substrate used. We found that with 950 – 990 °C anneal for 30 – 90 seconds, the layers intermixed completely and a YBa2Cu3Ox. polycrystalline film was produced. The best film was obtained on MgO with Tc above 84 K and Jc of 4x103 A/cm2 at 77 K. However, using the same RTA conditions, films on Si showed semiconducting behavior caused by silicon diffusion into the film as indicated by Auger depth profiling. In general, we found that using the RTA process, the film has less film-substrate interaction in comparison with furnace annealing due to a short anneal time. Using the RTA processing with the incorporation of a metal barrier layer, superconductivity of the film on Si was observed. Compared with other techniques, the RTA processing of layered structures provides a simple and rapid method for fabrication of high Tc superconducting thin films.

Keywords

Critical Current Density Sapphire Substrate Rapid Thermal Annealing Rapid Thermal Annealing Process Silicon Diffusion 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    R. B. Laibowitz, R. H. Koch, P. Chaudhari, and R. J. Gambino, Thin Superconducting Oxide Films, Phys. Rev. B 35, 8821 (1987).CrossRefGoogle Scholar
  2. 2.
    Chin-An Chang, C. C. Tsuei, C. C. Chi, and T. R. McGuire, Thin-film YBaCuO superconductors formed by Cu/BaO/Y20, layer structures, Appl. Phvs. Lett. 52, 72 (1988).ADSCrossRefGoogle Scholar
  3. 3.
    D. K. Lanthrop, S. E. Russek, and R. A. Buhrman, Production of YBa2Cu307−s superconducting thin films in situ by high-pressure reactive evaporation and rapid thermal annealing,Appl. Phys. Lett. 51, 1554 (1987).ADSCrossRefGoogle Scholar
  4. 4.
    M. Hong, S. H. Liou, J. Kwo, and B.A. Davidson, Superconducting Y-Ba-Cu-O oxide films by sputtering, Appl. Phys. Lett. 51, 694 (1987).Google Scholar
  5. 5.
    M. Scheuermann, C. C. Chi, C. C. Tsuei, D. S. Yee, J. J. Guomo, R. B. Laibowitz, R. H. Koch, B. Braren, R. Srinivasan, and M. M. Plechaty, Magnetron sputtering and laser patterning of high transition temperature Cu oxide films, Appl. Phys. Lett. 51, 1951 (1987).Google Scholar
  6. 6.
    D. Dijkkamp, T. Venkatesan, X. D. Wu, S. A. Shaheen, N. Jisrawi, Y.H. Min-Lee, W. L. McLean, and M. Croft, Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T. bulk material, Appl. Phvs. Lett. 51, 619 (1987).ADSCrossRefGoogle Scholar
  7. 7.
    J. Narayan, N. Biunno, R. SínRh, 0. W. Holland, and 0. Auciello, Formation of thin superconducting films by the laser processing method, Appl. Phys. Lett., 51, 1845 (1987).ADSCrossRefGoogle Scholar
  8. 8.
    G. Koren, A. Gupta, E. A. Giess, A Segmuller, and R. B. Laibowitz, Epitaxial films of YBa2Cu,07−x on NdGa03, LaGa03, and SrTiO, substrates deposited by laser ablation, Appl. Phys. Lett., 54, 1054 (1989).Google Scholar
  9. 9.
    J. Kwo, T. C. Hsieh, R. M. Fleming, M. Hong, S. H. Liou, B. A. Davidson, and L. C. Feldman, Structural and Superconducting Properties of Orientation-Ordered Y1Ba2Cu3O7−x Films Prepared by Molecular-Beam Epitaxy, Phys. Rev. B, 36, 4039 (1987).CrossRefGoogle Scholar
  10. 10.
    C. Webb, S. L. Weng, J. N. Eckstein, N. Missert, K. Char, D. G. Schiom, E. S. Hellman, M. R. Beaslay, A. Kapitulnik, and J. S. Harris, Jr., Growth of the high Tc Growth of the high superconducting thin films using molecular beam epitaxy techniques, Appl. Phys. Lett., 51, 1191 (1987).Google Scholar
  11. 11.
    T. Venkatesan, C. C. Chang, D. Dijkkamp, S. B. Ogale, E. W. Chase, L. A. Farrow, D. M. Hwang, P. F. Miceli, S. A. Schwarz, J. M. Tarascon, X. D. Wu, and A. Inam, Substrate effects on the properties of Y-Ba-Cu-O superconducting films prepared by laser deposition, J. Appl. Phys. 63, 4591 (1988).ADSCrossRefGoogle Scholar
  12. 12.
    C. T. Cheung and E. Ruckenstein, Superconductor-Substrate Interactions of the Y-Ba-Cu Oxide, J. Mater. Res., 4, 1 (1989).ADSCrossRefGoogle Scholar
  13. 13.
    X. D. Wu, A. Inam, T. Venkatesan, C. C. Chang, E. W. Chase, P. Barboux, J. M. Tarascon, and B. Wilkens, Low-temperature preparation of high Tc superconducting thin films, Appl. Phys. Lett., 52, 754 (1988).Google Scholar
  14. 14.
    S. Witanachchi, H. S. Kwok, X. W. Wang, and D. T. Shaw, Depoaition of superconducting Y-Ba-Cu-O films at 400°C without post-annealing, Appl. Phys. Lett., 53, 234 (1988).Google Scholar
  15. 15.
    Chin-An Chang, C. C. Tsuei, T. R. McGuire, D. S. Yee, J. P. Boresh, H. R. Lilienthal, and C. E. Farrell, YBaCuO superconducting films on SiO2 substrates formed from Cu/BaO/Y2Y, layer structures, Appl. Phys. Lett., 53, 916 (1988).Google Scholar
  16. 16.
    Q. Y. Ma, T. J. Licata, X. Wu, E. S. Yang, and Chin-An Chang, High Tc superconducting thin films by rapid thermal annealing of Cu/BaO/Y20, layered structures, Appl. Phys. Lett., 53, 2229 (1988).Google Scholar
  17. 17.
    P. Chaudhari, R. H. Koch, R. B. Laibowitz, T. R. McGuire, and R. J. Gambino, Critical current measurements in epitaxial films of YBa2Cu307−x compound, Phvs. Rev. Lett., 58, 2684 (1987).ADSCrossRefGoogle Scholar
  18. 18.
    Q. Y. Ma, E. S. Yang, and Chin-An Chang, Rapid thermal annealing of YBaCuO thin films deposited on SiO2 substrates, J. Appl. Phys., 66, 1866 (1989).ADSCrossRefGoogle Scholar
  19. 19.
    Q. Y. Ma, X. Wu, M. T. Schmidt, E. S. Yang, and Chin-An Chang, Interdiffusion between Si substrates and YBaCuO films, presented in International M2S-HTSC Conference, Stanford, July 1989, and to be published as a special issue of PHYSICA C.Google Scholar

Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • Q. Y. Ma
    • 1
  • M. T. Schmidt
    • 1
  • T. J. Licata
    • 1
  • D. V. Rossi
    • 1
  • E. S. Yang
    • 1
  • Chin-An Chang
    • 2
  • C. E. Farrell
    • 2
  1. 1.Microelectronics Sciences Laboratories and Center for Telecommunications Research1312 S. W. Mudd Columbia UniversityNew YorkUSA
  2. 2.IBM T. J. Watson Research CenterYorktown HeightsUSA

Personalised recommendations