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Techniques for Lateral Superlattices

  • Detlef Heitmann
Part of the NATO ASI Series book series (NSSB, volume 231)

Abstract

We review the fabrication of laterally microstructured semiconductor systems by holographic lithography and dry etching techniques. We discuss applications to electron systems of low dimensions, i.e., two-, one- and zero-dimensional systems (2DES, 1DES, 0DES), in particular grating coupler induced 2D plasmon resonances, intersubband resonances, minigaps and local plasmons in charge density modulated systems, dc transport and far infrared response in 1DES and 0DES as well as quantum well exciton polaritons in the photoluminescence of microstructured quantum well systems.

Keywords

Gate Voltage Quantum Wire Grating Coupler Wire Structure Plasmon Dispersion 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1990

Authors and Affiliations

  • Detlef Heitmann
    • 1
  1. 1.Max-Planck-Institut für FestkörperforschungStuttgart 80West-Germany

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