Abstract
This paper presents the recent advances on the in situ reflectance difference spectroscopy on metalorganic chemical vapor deposition growth technique. The high sensitivity of this in situ diagnostic, allows the growth of high quality III–V semiconductors heterojunctions, quantum wells and superlattices for photonic and electronic devices on lattice matched or alternative substrates, such as Si for the next decade’s OEICs.
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References
D.E. Aspnes, Thin Solid Films 89, 249 (1982).
D.E. Aspnes, J. Phys. (Paris) 44, C10-3 (1983)•
Y. Demay, P. Maurel, S. Gourier, ibid. 253.
B. Drevillon, Thin Solid Films 163, 157 (1988).
R.W. Collins, Advance in disordered semiconductors, Vol. I, ed. H. Fritzsche (World Scientific, 1989 ), p. 1003.
B. Drevillon, R. Benferhat, J. Appl. Phys. 63, 5088 (I988).
R. Benferhat, B. Drevillon and P. Robin, Thin Solid Films 156, 295 (1988).
M. Razeghi, P.L. Meunier, Ph. Maurel, J. Appl. Phys. 59, 2261,
M. Razeghi, the MOCVD challenge, Adam-Hilger (1989).
R.M.A. Azzam, N.M. Bashara, Ellipsometry and polarized light, North Holland ed. ( Amsterdam 1977 ).
O. Acher, E. Bigan, B. Drevillon, Rev. Sci. Instrum. 60 (1989) 65.
N. Blayo, B. Drevillon, J. Hue, Vacuum (in press).
O. Acher, F. Omnes, B. Drevillon, M. Razeghi, in E-MRS Strasbourg 89 Conference Proceeding, Symposium C (1989) (in press); and in Materials Science and Engineering, B (1989) (in press).
M. Razeghi, Ph. Maurel, F. Omnes, E. Thorngren, in Optical Properties of narrow gap low dimensional structures, Plenum Publishing Corporation (I987).
M. Razeghi, M. Defour, F. Omnes, Ph. Maurel, O. Acher, R. Blondeau, F. Brillouet, J.C.C. Fan, J. Salerno, Appl. Phys. Lett. 53 (1988), 2389.
O. Acher, F. Omnes, S. Koch, M. Razeghi, B. Drevillon, E. Bigan, to be published in “Revue Technique Thomson-CSF”, Gauthier-Villars, Paris.
R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North Holland, 1977, PP. 332–340.
Handbook of Optical Constants of Solids, Palik E.D. Editor, Academic Press (1985).
R. Del Sole, Annabella Selloni, Solid State Comm. 9, 825 (1984).
S.E. Acosta-Ortiz, A. Lastras-Martinez, Solid State Comm. 64, 809 (1987).
F. Manghi, E. Molinari, R. Del Sole, A. Selloni, Surf. Sci. 189 /190, 1028 (1987).
V.L. Berkovits, I.V. Makarenko, V. I. Safarov, Solid State Comm. 56, 449 (1985).
M. Razeghi, Ph. Maurel, F. Omnes. To be published in “Nato Advanced Research Workshop” on Properties of Impurity States in Semiconduction Superlattices, 1987.
M. Razeghi, A. Tardella, X.A. Davies, A.L. Long, M.J. Kelly, E. Britton, C. Boothroyd, W.A. Stobbes (1987). Electronic Letters, 23, 3, 1987.
M. Razeghi, Ph. Maurel, F. Omnes, J. Noyle, in Appl.Phys. Lett. 51, 2216 (1987).
M. Razeghi, Rev. Thomson-C.S.F., 16, 1 (1984).
P. Poulain, M. Razeghi, P. Hirtz, K. Kcymierski, B. Decremoux, 9th International Conf. on Semiconduction lasers, 7~H, August 1984, Rio, Brazil.
M. Dobers, J.P. Vieren, Y. Guldner, P. Bove, F. Omnes, and M. Razeghi, Phys. Rev. B, 40 (1989), in press.
M. Razeghi, P. Hirtz, R. Blondeau, J.P. Duchemin, Electron.
Lett. 19, 481, 1983.
M. Razeghi, R. Blondeau, J.C. Bouley, B. Decremoux, J.P. Duchemin, Proceeding of the 9th IEEE International laser conference, 1984.
M. Razeghi, F. Omnes, Ph. Maurel, R. Blondeau, M. Krakowski. SPIE Conference, Holland, 1987.
M. Razeghi, R. Blondeau, M. Krakowski, B. Decremoux, J.P. Duchemin, F. Lozes, M. Martinet, Bursoussan, Appl. Phys. Lett., 50, 230, 1987.
Y. Bourbin, A. Enard, R. Blondeau, M. Razeghi, M. Papuchon, B. Decremoux, to be published in Appl. Phys. Lett.
M. Razeghi, in Lightwave technology for communication, ed. W.T. Tsang ( Academic, N.Y.C., 1985 ).
M. Razeghi, P.L. Meunier, Ph. Maurel, J. Appl. Phys. 59, 2261,
M. Razeghi, P.L. Meunier, Ph. Maurel, J. Appl. Phys. 59, 2261,
M. Razeghi, MRT Report, private communication (1984).
M. Razeghi, Ph. Maurel, F. Omnes, E. Vassilakis-Thorngren, from Optical Properties of Narrow Gap Low Dimensional Structures, ed. C.M. Sottomayor Plenum publishing Corporation, 1987.
M. Razeghi, R. Blondeau, J.P. Duchemin, Inst. Phys. Conf. Sci. n°74, chap. 9, P. 679.
M. Razeghi, J. Ramdami, P. Legry, J.P. Vilcot, D. Decoster, to be published in the Proceeding of the 1987 GaAs and related compounds conference, Creta.
M. Razeghi, A. Hosseini, J.P. Vilcot, D. Decoster, to be published in the Proceeding of the 1987 GaAs and related compounds Conference, Creta.
M. Razeghi, J. Ramdani, H. Verriele, D. Decoster, M. Constant, J. Vanbremeersh, Appl. Phys. Lett. 49, 215, 1986.
M. Razeghi, M. Defour, F. Omnes, Ph. Maurel, J. Chazelas, F. Brillouet, Appl. Phys. Lett. 53, 725 (1988).
M. Razeghi et al., to be published in Appl. Phys. Lett. (1989).
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Razeghi, M., Acher, O. (1990). Advanced Materials Technology for the Next Decade’s OEICs. In: Chamberlain, J.M., Eaves, L., Portal, JC. (eds) Electronic Properties of Multilayers and Low-Dimensional Semiconductor Structures. NATO ASI Series, vol 231. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-7412-1_20
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