In the last chapter, the areas where contaminants are generated were discussed. Knowing the location of contaminant generation is helpful in controlling that contamination, but understanding the mechanisms is equally important in that control process. Process materials, tools, equipment, and personnel control of operations are necessary in any production operation. Many of the contaminant sources cannot be avoided, but some control and remedial activities are possible and should be used. Knowing the contamination-generation processes and the mechanisms involved may aid in providing information to minimize the type, rate, and time of contaminant emission from specific sources. Understanding the contaminant-generation mechanisms can also help to show the nature of the specific contaminant material that is produced by a particular source. In this way, knowledge is available that may allow advantageous modification of a process or component to reduce contamination-generation rates.
KeywordsWear Particle Particle Generation Charge Level Dioctyl Phthalate Vapor Emission
Unable to display preview. Download preview PDF.
- Borden, P., 1990. Monitoring Particles in Production Vacuum Process Equipment: The Nature of Particle Generation. Microcontamination 8( 1 ):21–26.Google Scholar
- Liu, B. Y. H., et al., 1985. Characterization of Electronic Ionizers for Clean Rooms. Proceedings of the 31st Institute of Environmental Sciences Annual Technical Meeting, May 1985, Las Vegas.Google Scholar
- Prater, W., et al., 1989. Preventing Contamination in Magnetic Disk Drives Through the Use of Wear Resistant Coatings. Microcontamination 7(4):31–39.Google Scholar
- Sebald, T., Stiehl, H., & Sigusch, R., 1986. How to Avoid Particle Generation from Needle Electrodes of Ionizer Systems for Clean Rooms. Proceedings of the Fine Particle Society Technical Meeting, July 1986. San Francisco.Google Scholar