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Gaseous, Chemical, and Other Contaminant Descriptions

  • Alvin Lieberman

Abstract

Most contamination control technology considers generalized and often unidentified particulate material as the major contaminant, but there are many situations in which gases, chemical films, microbiological materials, environment physical conditions, and unusual ambient energy levels are hazardous to the well-being of the products. This variety of contaminants can degrade product quality at least as seriously as can particulate contaminants. In fact, as particle removal and control methods improve, contaminating gases and vapors become a major problem area. However, their sources can be different than the particle sources, their transport and deposition mechanisms are different, their interaction with products and their control and/or removal procedures are different, and their spatial and temporal distributions in the manufacturing and processing environment are usually different from that of particulate contamination.

Keywords

Semiconductor Manufacturing Organic Vapor Wafer Fabrication Airborne Bacterium Electrostatic Discharge 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Van Nostrand Reinhold 1992

Authors and Affiliations

  • Alvin Lieberman

There are no affiliations available

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