Abstract
Definition of contamination level in liquids requires that a representative sample of the liquid be obtained for measurement and that a measurement method be used that is compatible with both the liquid and the contaminant of concern. Contaminants in liquids that are of concern include dissolved ionic inorganic materials and nonpolar organic materials, dissolved gaseous compounds, and particulate contaminants, both inert and viable. This chapter is directed primarily toward measurement of the particulate contaminants in cleanroom liquids. Procedures for sampling, storing, and measuring dissolved contaminants are outside the scope of this chapter.
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© 1992 Van Nostrand Reinhold
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Lieberman, A. (1992). Particulate Contamination Measurement in Liquids. In: Contamination Control and Cleanrooms. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-6512-9_30
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DOI: https://doi.org/10.1007/978-1-4684-6512-9_30
Publisher Name: Springer, Boston, MA
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