Particulate Contamination Measurement in Liquids

  • Alvin Lieberman


Definition of contamination level in liquids requires that a representative sample of the liquid be obtained for measurement and that a measurement method be used that is compatible with both the liquid and the contaminant of concern. Contaminants in liquids that are of concern include dissolved ionic inorganic materials and nonpolar organic materials, dissolved gaseous compounds, and particulate contaminants, both inert and viable. This chapter is directed primarily toward measurement of the particulate contaminants in cleanroom liquids. Procedures for sampling, storing, and measuring dissolved contaminants are outside the scope of this chapter.


Liquid System Very Large Scale Integration Side Stream American National Standard Institute Nonvolatile Residue 
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© Van Nostrand Reinhold 1992

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  • Alvin Lieberman

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