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Optical Measurement of Deposited Particles

  • Alvin Lieberman

Abstract

Contamination control in most cleanrooms is mainly directed to maintaining cleanliness of the cleanroom air, the processing materials used, and the products produced in that cleanroom. It is assumed that if the environment where the cleanroom product is manufactured is kept clean, then the product will not become contaminated. Unfortunately, keeping the manufacturing environment clean is only part of the task of avoiding product contamination. Any tool, process material, analytical device, and particularly the personnel used in the manufacturing process can contaminate the manufacturing process even if the entire operation is carried out in clean air. Handling materials or process components can contaminate them. Both chemical film and particle contaminants can be deposited on product surfaces with subsequent product quality degradation. For this reason, definition of the contamination deposited upon products during manufacturing is a necessary step in maintaining product quality.

Keywords

Deposit Particle Wafer Surface Contamination Control Laser Scanning System Sonic Energy 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Van Nostrand Reinhold 1992

Authors and Affiliations

  • Alvin Lieberman

There are no affiliations available

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