Abstract
Gas sampling is carried out to measure the quality of a gas. Gas samples are sometimes acquired by in situ observation within the main gas body by using remote or visual observation for specific properties. A more frequent method of sampling consists of removing a portion of the gas from the main body and transporting it to a location where the pertinent properties of the gas can be defined. These properties may be physical properties, such as temperature or pressure; they may be the chemical properties of gas itself or of it’s impurity content. In cleanroom applications, the particulate content of the gas is of major importance. Because particles are not uniformly distributed in the gas, sampling problems in defining these materials are atypical as compared to those for sample handling to define other properties of a gas. Sampling for particle content is discussed in some detail here.
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© 1992 Van Nostrand Reinhold
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Lieberman, A. (1992). Gas Sampling Considerations. In: Contamination Control and Cleanrooms. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-6512-9_22
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DOI: https://doi.org/10.1007/978-1-4684-6512-9_22
Publisher Name: Springer, Boston, MA
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