Component and Equipment Testing

  • Alvin Lieberman


Component and equipment are tested to make sure that these items carry out their design function but do not generate unacceptable quantities of contaminants while doing so. Most production tools generate some quantity of contaminants in operation. Modification of the tool so that contaminant generation is completely eliminated may be prohibitively costly. However, significant reduction in generation of harmful materials in tool operation can be achieved with economically acceptable improvements in components and/or operations (Silverman and Gruver 1990). Such steps as incorporation of improved filters in a chemical process liquid line or requiring adherence to inspection schedules and immediate remedial action where indicated can reduce contamination from tools and processes to a great extent.


Equipment Test Process Tool Optical Particle Counter Vapor Release Inspection Schedule 
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© Van Nostrand Reinhold 1992

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  • Alvin Lieberman

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